CMP Pad Conditioners

3M diamond, soft-brush, and micro replicated chemical mechanical planarization (CMP) pad conditioners are engineered to meet the most demanding process requirements. Using precisely engineered, micro replicated, diamond-coated ceramic structures, 3M Trizact™ pad conditioners provide excellent, highly consistent disk-to-disk performance for the most demanding advanced node processes. The diamond pad conditioners use a 3M exclusive sintered abrasive technology to provide a powerful chemical and mechanical bond between diamonds and substrate, helping keep diamonds intact and in place for consistent long-term conditioning performance.